Publications on uncertainty of linear dimensions measuring with scanning electron microscope were analyzed. The estimation of measurement uncertainty of SiO2 particles diameter by electron microscopy were carried out. The sources of uncertainty typical for this method of investigation were analyzed. It was established that the determining factor affecting the uncertainty of measurement is instrumental component. The features of processing of microphotographs for the determination of structured materials characteristics (particles size, the law of distribution by diameter, structure defectiveness) were shown.
measurement uncertainty, photonic crystals, scanning electron microscope, the law distributions, structured materials
"Otsinka nevyznachenosti vymiriuvan diametru chastynok SiO2 metodom elektronnoi mikroskopii pry formuvanni strukturovanykh materialiv" [Uncertainty evaluation of SiO2 diameter measurement with electron microscopy at forming structured materials],
Information Processing Systems,