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  5. Mechanical characteristics of surface layers of silicon at bombardment by the accelerated ions

Mechanical characteristics of surface layers of silicon at bombardment by the accelerated ions

А.К. Gnap, N.М. Pelikatniy, N.I. Kovalenko, N.Ya. Rokhmanov, G.V. Prokhorov
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The results of learning of influence of bombardment of silicon by ions of boron and silicon on its microhardness, cracking resistance are indicated. The measurements were carried out by pressure of diamond indentor into a stratum
Reference:
Hnap, A.K., Pelykhatыi, N.M., Kovalenko, N.Y., Rokhmanov, N.Ya. and Prokhorov, H.V. (2003), "Mekhanycheskye svoistva poverkhnostnыkh sloev kremnyia pry bombardyrovke uskorennыmy yonamy" , Information Processing Systems, Vol. 4(26), pp. 8-13.