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  5. Processing of results of the interference-optical measurements of roundness

Processing of results of the interference-optical measurements of roundness

O.M. Zahurska
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There was conducted processing of results of the measurements of roundness of the objects. Were analysed the influential factors during the measurement and there were distinguished systematic displacements that appear during the interferenceoptical measurements. There were mentioned algorithms of determination and adjustment of the systematic displacements as a result of the measurement. There were presented results of value of the systematic displacements of the object 40 mm by diameter and evaluated standard uncertainty of the results. The evaluated standard uncertainty of roundness of the example presented in the work is between 0.06 and 0.09 µm. There was determined significance of tolerance of the roundness for the examined object.
Keywords: roundness, systematic displacement, uncertainty of interference-optical measurement