S.I. Melnik, N.I. Slipchenko

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The formula for estimate of the highest level attainable of the space resolving power in the microwave scanning microscopy was received. It is demonstrated that the signal-noise ratio produce the multiplicative effect in it as well, as the localizing factor of the scanning field (it is associated with its curvature maximum). So, the space resolving power can be improved substantially by the sensor point minimization not only, but by the reduction of noise-signal component and by the algorithm of reconstruction to the measured profile. Verification of accuracy of the estimate on the real dates demonstrated its adequacy. The space resolving power was improved in comparison with the initial dates by a factor of 10.