The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. Digital holography is an emergent new imaging technology that inherits many of the unique capabilities of conventional holography but provides novel solutions to some of the key problems that have been limiting its applications and further development.
Ключові слова: nano metrology, digital holography, microscopy, interferometry, CCD-camera
Methods and instrumentation of digital holography in micro and nano metrology,
Information Processing Systems,