The system for analysis of growth defects of semiconductor crystals
L.І. D’yachenko, E.V. Minov, S.E. Ostapov, I.J. Nakonechnyi, V.І. Burkut, O.V. Kopach, P.M. Fochuk
The software for the defect subsystem identification from the images, which are formed during the actual scanning of semiconductor crystals in the infrared rays, was developed. The scheme and a description of the installation, which is used to obtain images, and describes an algorithm for recognizing the IR images is shown. The algorithm of recognition and validation of a new method for testing the correctness of existing software systems for modeling the structure and parameters of the impurity subsystem of semiconductor crystals is described .
software package, recognition algorithm, the defect subsystem, infrared images, testing, statistical data processing, semiconductor crystals
"Systema analizu defektiv vyroshchuvannia napivprovidnykovykh krystaliv" ,
Information Processing Systems,